Lithography / Patterning Tools
- Karl Suss MA6 Mask Aligner
- Karl Suss MJB 3 Mask Aligner
- Laser MicroMachining System
- Optical Microscope
- Spin Coater
- Hot Plate
Deposition Tools
- Atomic Layer Deposition System
- Ink-Jet Deposition System
- PVD 75 Electron Beam Deposition System
- PVD 75 Sputtering Deposition System
- Thermal Evaporator
Etching Tools
Metrology Tools
- M-2000V Spectroscopic Ellipsometer
- Microscope System with Fast CCD Camera
- PHE101 Discrete Wavelength Ellipsometer
- Profilometer
- XGT-5000 X-ray Analytical Microscope
- Zetasizer Nano ZS Analyzer
- Carl Zeiss Axio Scope.A1 Microscopy Systems
- Model EZ7 Vibrating Sample Magnetometer (VSM)