Equipment

Lithography / Patterning Tools

• Karl Suss MA6 Mask Aligner
• Karl Suss MJB 3 Mask Aligner
• Laser MicroMachining System
• Optical Microscope
• Spin Coater
• Hot Plate

Deposition Tools

• Atomic Layer Deposition System
• Ink-Jet Deposition System
• PVD 75 Electron Beam Deposition System
• PVD 75 Sputtering Deposition System
• Thermal Evaporator

Etching Tools

• Trion Phantom III RIE Etcher
• Trion Sirus T2 TableTop RIE Etcher

Metrology Tools

• Malvern Morphologi 4
• M-2000V Spectroscopic Ellipsometer
• Microscope System with Fast CCD Camera
• PHE101 Discrete Wavelength Ellipsometer
• Profilometer
• XGT-5000 X-ray Analytical Microscope
• Zetasizer Nano ZS Analyzer
• Carl Zeiss Axio Scope.A1 Microscopy Systems
• Model EZ7 Vibrating Sample Magnetometer (VSM)

Biology Tools

• Bio-Hood
• CO2 Incubator
• Incubator Shaker
• Refrigerator

Other Processing tools

• Plasma Cleaner
• Wire Bonder
• Equipment Map