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    • Deposition Tools
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  • Home
  • Equipment
    • Lithography / Patterning Tools
    • Deposition Tools
    • Etching Tools
    • Metrology Tools
    • Biology Tools
    • Other Processing Tools
    • Equipment Map
  • Scheduling
  • Policies
  • Resources
  • Sponsors
  • Contact

Equipment

close up of technical equipment

Lithography / Patterning Tools

  • Karl Suss MA6 Mask Aligner
  • Karl Suss MJB 3 Mask Aligner
  • Laser MicroMachining System
  • Optical Microscope
  • Spin Coater
  • Hot Plate

Deposition Tools

  • Atomic Layer Deposition System
  • Ink-Jet Deposition System
  • PVD 75 Electron Beam Deposition System
  • PVD 75 Sputtering Deposition System
  • Thermal Evaporator

Etching Tools

  • Trion Phantom III RIE Etcher
  • Trion Sirus T2 TableTop RIE Etcher

Metrology Tools

  • Malvern Morphologi 4
  • M-2000V Spectroscopic Ellipsometer
  • Microscope System with Fast CCD Camera
  • PHE101 Discrete Wavelength Ellipsometer
  • Profilometer
  • XGT-5000 X-ray Analytical Microscope
  • Zetasizer Nano ZS Analyzer
  • Carl Zeiss Axio Scope.A1 Microscopy Systems
  • Model EZ7 Vibrating Sample Magnetometer (VSM)

Biology Tools

  • Bio-Hood
  • CO2 Incubator
  • Incubator Shaker
  • Refrigerator

Other Processing tools

  • Plasma Cleaner
  • Wire Bonder
  • Equipment Map
NanoSEC cleanroom
Riverbend Research South Laboratory
220 Riverbend Road
Athens, GA 30602


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