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Equipment
Lithography / Patterning Tools
Deposition Tools
Etching Tools
Metrology Tools
Biology Tools
Other Processing Tools
Equipment Map
Scheduling
Policies
Resources
Sponsors
Contact
Home
Equipment
Lithography / Patterning Tools
Deposition Tools
Etching Tools
Metrology Tools
Biology Tools
Other Processing Tools
Equipment Map
Scheduling
Policies
Resources
Sponsors
Contact
Scheduling
All the cleanroom users must reserve use of equipment.
The user group is “RBS_CLEANROOM.”
Only trained users may reserve specific equipment.
Username and passwords can be obtained from cleanroom director or manager.
Contact us for more information.
Schedule Equipment