The speed, accuracy, and wide spectral range of the M-2000 make it ideal for a diverse range of measurements. The primary application of ellipsometry is to characterize film thickness and optical constants. The M-2000 excels at both. It measures film thickness from sub-nanometers up to tens of microns and the optical properties from transparent to absorbing materials. This flexible instrument can characterize any type of thin film: dielectric, organic, semiconductor, metal, and more. Wide spectral range and variable angle allow the M-2000 to diagnose many multi-layered structures.
Metrology Tools
The FS-110 transmitted and reflected light microscope is a long working distance microscope with both reflection and transmission modes, bright field and dark field views plus the polarization effect. It is designed specifically for wafer inspection with a custom large substrate stage that can accommodate our substrate needs. The long working distance objectives installed in the microscope allow us to install micromanipulators to move nanostructures and to connect nanostructures to electrodes or optical light, which cannot be achieved by any other microscopes.
This microscope will be used to inspect defects of thin films fabricated in the cleanroom, the film uniformity, the pattern generated by lithography, as well as other vision inspections for biological samples. It will be also used to manipulate nanoscale objects through long focal length objectives for property measurements.
This microscope is also equipped with a Phantom v5.2 Monochrome High Speed Camera. This high speed high resolution camera can supply a full-sensor recording speed of 1,000 frames per second, and offer a wider image window composed of 1152 × 896 pixels. With reduced resolution settings it provides rates of up to 148,148 fps. It has built-in 3GB image memory. It will be mounted in cleanroom microscope for observations of micro-/nano-fluidic motion, such as magnetic fluid in micro/nano channels, micro/nano bubble motions in microfluidic devices. It can also be use to study the performance of microfluidic devices for biological application, micro-electrical mechanical system (MEMS) devices, nano-electrical mechanical system (NEMS) devices, the dynamic behavior of biological system such as cells, microorganism etc.
The PHE101 is the latest discrete wavelength ellipsometer with many new features, such as materials library, widest variable angle, a second laser for alignment and very powerful software making the instrument highest accuracy and repetition. It is used to measure the thickness and index of refraction of a dielectric coating.
The Dektak® 150 surface profiler is an advanced thin and thick film step height measurement tool capable of measuring steps below 100Å. It also measures samples up to six inches in dimension and up to four inches thick. The Dektak 150 is used to profile surface topography and waviness, as well as to measure surface roughness in the nanometer range. The system provides a step-height repeatability of 0.6 nm (6Å.).
With the unique X-ray Guide Tube the bench top XGT-5000 systems allow convenient access to X-ray fluorescence analysis with high spatial resolution – from 1.2 mm down to 10 µm. There is no sample preparation or vacuum required. Two X-ray guide tubes are provided in the instrument, allowing the user to simply switch between a micro and macro beams, so that a range of experiments can be accommodated. XRF mapped images are easily obtained through automated sample scanning, and the provision of a second detector beneath the sample enables simultaneous acquisition of X-ray transmission images. The additional structural information provided by this technology is extremely useful for locating regions of interest, or interrogating a sample’s internal structure. The XRF system is used to mapping the chemical components in a material.
The Zetasizer Nano ZS is a high performance two angle particle and molecular size analyzer for the enhanced detection of aggregates and measurement of small or dilute samples, and samples at very low or high concentration using dynamic light scattering with ‘NIBS’ optics. The ZSP also incorporates a zeta potential analyzer that uses electrophoretic light scattering for particles, molecules and surfaces, and a molecular weight analyzer using static light scattering.
Axio Scope.A1 makes use of exceptional flexibility for complex routine examinations. Examine tissue samples in pathology or evaluate cytological material. Axio Scope.A1 is highly configurable with five different upper bodies; three lower bodies and two Vario columns. The Zeiss Axioscope A1 can be used with reflected and transmitted light techniques such as Brightfield, darkfield, polarization, DIC, circular DIC, fluorescence, and phase contrast.
We also have several filter sets for different wavelength:
1. Zeiss CY 3 Filter Set 43 HE
2. FL Filter Set 02, EX G 365 Shift Free
3. FL Filter Set 64 HE mCherry, Shift Free
4. FL Filter set 38 Endow GFP shift free.
The EZ7 Vibrating Sample Magnetometer can reach fields up to 21.5 kOe at a sample space of 4 mm and fields above 17.5 kOe with the temperature chamber in place. The low field noise of less than 5 mOe RMS make this the most suitable electro-magnet VSM for low coercivity measurements but the system is equally suitable measurement system for samples with high coercivities because of it’s high maximum field.
This VSM model can measure liquid, powder, solid, bulk, and thin film samples and is supplied with sample holders for all these types of samples. The excellent real world low noise performance make this VSM an excellent choice for samples with a low magnetic moment.
The external user fee is $500/sample.