The FS-110 transmitted and reflected light microscope is a long working distance microscope with both reflection and transmission modes, bright field and dark field views plus the polarization effect. It is designed specifically for wafer inspection with a custom large substrate stage that can accommodate our substrate needs. The long working distance objectives installed in the microscope allow us to install micromanipulators to move nanostructures and to connect nanostructures to electrodes or optical light, which cannot be achieved by any other microscopes.
This microscope will be used to inspect defects of thin films fabricated in the cleanroom, the film uniformity, the pattern generated by lithography, as well as other vision inspections for biological samples. It will be also used to manipulate nanoscale objects through long focal length objectives for property measurements.
This microscope is also equipped with a Phantom v5.2 Monochrome High Speed Camera. This high speed high resolution camera can supply a full-sensor recording speed of 1,000 frames per second, and offer a wider image window composed of 1152 × 896 pixels. With reduced resolution settings it provides rates of up to 148,148 fps. It has built-in 3GB image memory. It will be mounted in cleanroom microscope for observations of micro-/nano-fluidic motion, such as magnetic fluid in micro/nano channels, micro/nano bubble motions in microfluidic devices. It can also be use to study the performance of microfluidic devices for biological application, micro-electrical mechanical system (MEMS) devices, nano-electrical mechanical system (NEMS) devices, the dynamic behavior of biological system such as cells, microorganism etc.